Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns
نویسندگان
چکیده
منابع مشابه
low stress acrylated hyperbranched polymers
The objective of this study was to investigate the behavior of highly functional acrylates, during isothermal ultraviolet (UV) curing. The materials included a penta-functional acrylate and two acrylated hyperbranched polymers, one with a stiff polyester core and one with a more flexible polyether core. In particular, the influence of UV intensity and reactive blend composition on structural tr...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2008
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/18/4/045022